JPH02110332U - - Google Patents
Info
- Publication number
- JPH02110332U JPH02110332U JP1936889U JP1936889U JPH02110332U JP H02110332 U JPH02110332 U JP H02110332U JP 1936889 U JP1936889 U JP 1936889U JP 1936889 U JP1936889 U JP 1936889U JP H02110332 U JPH02110332 U JP H02110332U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- oxygen plasma
- plasma gas
- holding groove
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1936889U JPH02110332U (en]) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1936889U JPH02110332U (en]) | 1989-02-20 | 1989-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110332U true JPH02110332U (en]) | 1990-09-04 |
Family
ID=31234817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1936889U Pending JPH02110332U (en]) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110332U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5460567A (en) * | 1977-10-24 | 1979-05-16 | Hitachi Ltd | Plasma processor |
-
1989
- 1989-02-20 JP JP1936889U patent/JPH02110332U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5460567A (en) * | 1977-10-24 | 1979-05-16 | Hitachi Ltd | Plasma processor |
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